4/23/2012	8:55:46 AM	Recipe started at 8:55 AM
4/23/2012	8:55:46 AM	Helium valve closed
4/23/2012	8:55:46 AM	H2 valve closed
4/23/2012	8:55:46 AM	BCl3 valve closed
4/23/2012	8:55:46 AM	PH3 valve closed
4/23/2012	8:55:46 AM	SiCl4 pre valve closed
4/23/2012	8:55:47 AM	SiCl4 post valve closed
4/23/2012	8:55:47 AM	Bypass valve closed
4/23/2012	8:55:47 AM	Bubbler valve closed
4/23/2012	8:55:47 AM	Main Vac valve opened
4/23/2012	8:55:47 AM	Helium MFC set to  0.000000
4/23/2012	8:55:47 AM	H2 MFC set to  0.000000
4/23/2012	8:55:47 AM	BCl3 MFC set to  0.000000
4/23/2012	8:55:47 AM	PH3 MFC set to  0.000000
4/23/2012	8:55:47 AM	SiCl4 MFC set to  0.000000
4/23/2012	8:55:47 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	8:55:47 AM	Tube furnace set to 0
4/23/2012	8:55:47 AM	Run aborted at 8:55 AM
4/23/2012	8:55:47 AM	Helium valve closed
4/23/2012	8:55:47 AM	H2 valve closed
4/23/2012	8:55:47 AM	BCl3 valve closed
4/23/2012	8:55:47 AM	PH3 valve closed
4/23/2012	8:55:47 AM	SiCl4 pre valve closed
4/23/2012	8:55:47 AM	SiCl4 post valve closed
4/23/2012	8:55:47 AM	Bypass valve closed
4/23/2012	8:55:47 AM	Main Vac valve closed
4/23/2012	8:55:47 AM	Bubbler valve closed
4/23/2012	8:55:47 AM	Helium MFC set to  0.000000
4/23/2012	8:55:47 AM	H2 MFC set to  0.000000
4/23/2012	8:55:47 AM	BCl3 MFC set to  0.000000
4/23/2012	8:55:48 AM	PH3 MFC set to  0.000000
4/23/2012	8:55:48 AM	SiCl4 MFC set to  0.000000
4/23/2012	8:55:48 AM	Tube furnace set to 0
4/23/2012	8:56:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	8:56:01 AM	Recipe started at 8:56 AM
4/23/2012	8:56:01 AM	Helium valve closed
4/23/2012	8:56:01 AM	H2 valve closed
4/23/2012	8:56:01 AM	BCl3 valve closed
4/23/2012	8:56:01 AM	PH3 valve closed
4/23/2012	8:56:01 AM	SiCl4 pre valve closed
4/23/2012	8:56:01 AM	SiCl4 post valve closed
4/23/2012	8:56:01 AM	Main Vac valve closed
4/23/2012	8:56:01 AM	Bypass valve closed
4/23/2012	8:56:01 AM	Bubbler valve closed
4/23/2012	8:56:01 AM	Helium MFC set to  0.000000
4/23/2012	8:56:01 AM	H2 MFC set to  0.000000
4/23/2012	8:56:01 AM	BCl3 MFC set to  0.000000
4/23/2012	8:56:01 AM	PH3 MFC set to  0.000000
4/23/2012	8:56:01 AM	SiCl4 MFC set to  0.000000
4/23/2012	8:56:01 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	8:56:01 AM	Tube furnace set to 0
4/23/2012	8:56:04 AM	H2 valve closed
4/23/2012	8:56:04 AM	BCl3 valve closed
4/23/2012	8:56:04 AM	PH3 valve closed
4/23/2012	8:56:04 AM	SiCl4 pre valve closed
4/23/2012	8:56:04 AM	SiCl4 post valve closed
4/23/2012	8:56:04 AM	Main Vac valve closed
4/23/2012	8:56:04 AM	Bypass valve closed
4/23/2012	8:56:04 AM	Bubbler valve closed
4/23/2012	8:56:04 AM	Helium valve opened
4/23/2012	8:56:04 AM	Helium MFC set to  500.000000
4/23/2012	8:56:04 AM	H2 MFC set to  0.000000
4/23/2012	8:56:04 AM	BCl3 MFC set to  0.000000
4/23/2012	8:56:04 AM	PH3 MFC set to  0.000000
4/23/2012	8:56:04 AM	SiCl4 MFC set to  0.000000
4/23/2012	8:56:04 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	8:56:04 AM	Tube furnace set to 0
4/23/2012	8:57:05 AM	Helium valve closed
4/23/2012	8:57:05 AM	H2 valve closed
4/23/2012	8:57:05 AM	BCl3 valve closed
4/23/2012	8:57:05 AM	PH3 valve closed
4/23/2012	8:57:05 AM	SiCl4 pre valve closed
4/23/2012	8:57:05 AM	SiCl4 post valve closed
4/23/2012	8:57:05 AM	Main Vac valve closed
4/23/2012	8:57:05 AM	Bypass valve closed
4/23/2012	8:57:05 AM	Bubbler valve closed
4/23/2012	8:57:05 AM	Helium MFC set to  0.000000
4/23/2012	8:57:05 AM	H2 MFC set to  0.000000
4/23/2012	8:57:05 AM	BCl3 MFC set to  0.000000
4/23/2012	8:57:05 AM	PH3 MFC set to  0.000000
4/23/2012	8:57:05 AM	SiCl4 MFC set to  0.000000
4/23/2012	8:57:05 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	8:57:05 AM	Tube furnace set to 0
4/23/2012	8:57:06 AM	Run finished at 8:57 AM
4/23/2012	8:57:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	8:59:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	8:59:06 AM	Recipe started at 8:59 AM
4/23/2012	8:59:06 AM	Helium valve closed
4/23/2012	8:59:06 AM	H2 valve closed
4/23/2012	8:59:06 AM	BCl3 valve closed
4/23/2012	8:59:06 AM	PH3 valve closed
4/23/2012	8:59:06 AM	SiCl4 pre valve closed
4/23/2012	8:59:06 AM	SiCl4 post valve closed
4/23/2012	8:59:06 AM	Main Vac valve closed
4/23/2012	8:59:06 AM	Bubbler valve closed
4/23/2012	8:59:06 AM	Bypass valve opened
4/23/2012	8:59:06 AM	Helium MFC set to  0.000000
4/23/2012	8:59:06 AM	H2 MFC set to  0.000000
4/23/2012	8:59:06 AM	BCl3 MFC set to  0.000000
4/23/2012	8:59:06 AM	PH3 MFC set to  0.000000
4/23/2012	8:59:06 AM	SiCl4 MFC set to  0.000000
4/23/2012	8:59:06 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	8:59:06 AM	Tube furnace set to 0
4/23/2012	9:00:07 AM	Helium valve closed
4/23/2012	9:00:07 AM	H2 valve closed
4/23/2012	9:00:07 AM	BCl3 valve closed
4/23/2012	9:00:07 AM	PH3 valve closed
4/23/2012	9:00:07 AM	SiCl4 pre valve closed
4/23/2012	9:00:07 AM	SiCl4 post valve closed
4/23/2012	9:00:07 AM	Main Vac valve closed
4/23/2012	9:00:07 AM	Bubbler valve closed
4/23/2012	9:00:07 AM	Bypass valve opened
4/23/2012	9:00:07 AM	Helium MFC set to  0.000000
4/23/2012	9:00:07 AM	H2 MFC set to  0.000000
4/23/2012	9:00:07 AM	BCl3 MFC set to  0.000000
4/23/2012	9:00:07 AM	PH3 MFC set to  0.000000
4/23/2012	9:00:07 AM	SiCl4 MFC set to  0.000000
4/23/2012	9:00:07 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	9:00:08 AM	Tube furnace set to 0
4/23/2012	9:01:08 AM	Helium valve closed
4/23/2012	9:01:08 AM	H2 valve closed
4/23/2012	9:01:08 AM	BCl3 valve closed
4/23/2012	9:01:08 AM	PH3 valve closed
4/23/2012	9:01:08 AM	SiCl4 pre valve closed
4/23/2012	9:01:08 AM	SiCl4 post valve closed
4/23/2012	9:01:08 AM	Bypass valve closed
4/23/2012	9:01:08 AM	Bubbler valve closed
4/23/2012	9:01:08 AM	Main Vac valve opened
4/23/2012	9:01:08 AM	Helium MFC set to  0.000000
4/23/2012	9:01:08 AM	H2 MFC set to  0.000000
4/23/2012	9:01:08 AM	BCl3 MFC set to  0.000000
4/23/2012	9:01:08 AM	PH3 MFC set to  0.000000
4/23/2012	9:01:08 AM	SiCl4 MFC set to  0.000000
4/23/2012	9:01:08 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	9:01:08 AM	Tube furnace set to 0
4/23/2012	9:01:09 AM	Run finished at 9:01 AM
4/23/2012	9:01:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	10:07:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	10:07:41 AM	Recipe started at 10:07 AM
4/23/2012	10:07:41 AM	Helium valve closed
4/23/2012	10:07:41 AM	H2 valve closed
4/23/2012	10:07:41 AM	BCl3 valve closed
4/23/2012	10:07:41 AM	PH3 valve closed
4/23/2012	10:07:41 AM	SiCl4 pre valve closed
4/23/2012	10:07:41 AM	SiCl4 post valve closed
4/23/2012	10:07:41 AM	Main Vac valve closed
4/23/2012	10:07:41 AM	Bypass valve closed
4/23/2012	10:07:41 AM	Bubbler valve closed
4/23/2012	10:07:41 AM	Helium MFC set to  0.000000
4/23/2012	10:07:41 AM	H2 MFC set to  0.000000
4/23/2012	10:07:41 AM	BCl3 MFC set to  0.000000
4/23/2012	10:07:41 AM	PH3 MFC set to  0.000000
4/23/2012	10:07:41 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:07:41 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:07:42 AM	Tube furnace set to 0
4/23/2012	10:07:45 AM	H2 valve closed
4/23/2012	10:07:45 AM	BCl3 valve closed
4/23/2012	10:07:45 AM	PH3 valve closed
4/23/2012	10:07:45 AM	SiCl4 pre valve closed
4/23/2012	10:07:45 AM	SiCl4 post valve closed
4/23/2012	10:07:45 AM	Main Vac valve closed
4/23/2012	10:07:45 AM	Bypass valve closed
4/23/2012	10:07:45 AM	Bubbler valve closed
4/23/2012	10:07:45 AM	Helium valve opened
4/23/2012	10:07:45 AM	Helium MFC set to  500.000000
4/23/2012	10:07:45 AM	H2 MFC set to  0.000000
4/23/2012	10:07:45 AM	BCl3 MFC set to  0.000000
4/23/2012	10:07:45 AM	PH3 MFC set to  0.000000
4/23/2012	10:07:45 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:07:45 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:07:45 AM	Tube furnace set to 0
4/23/2012	10:08:50 AM	Helium valve closed
4/23/2012	10:08:50 AM	H2 valve closed
4/23/2012	10:08:50 AM	BCl3 valve closed
4/23/2012	10:08:50 AM	PH3 valve closed
4/23/2012	10:08:50 AM	SiCl4 pre valve closed
4/23/2012	10:08:50 AM	SiCl4 post valve closed
4/23/2012	10:08:50 AM	Main Vac valve closed
4/23/2012	10:08:50 AM	Bypass valve closed
4/23/2012	10:08:50 AM	Bubbler valve closed
4/23/2012	10:08:50 AM	Helium MFC set to  0.000000
4/23/2012	10:08:50 AM	H2 MFC set to  0.000000
4/23/2012	10:08:50 AM	BCl3 MFC set to  0.000000
4/23/2012	10:08:50 AM	PH3 MFC set to  0.000000
4/23/2012	10:08:50 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:08:50 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:08:50 AM	Tube furnace set to 0
4/23/2012	10:08:51 AM	Run finished at 10:08 AM
4/23/2012	10:08:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	10:13:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	10:13:48 AM	Recipe started at 10:13 AM
4/23/2012	10:13:48 AM	Helium valve closed
4/23/2012	10:13:48 AM	H2 valve closed
4/23/2012	10:13:48 AM	BCl3 valve closed
4/23/2012	10:13:48 AM	PH3 valve closed
4/23/2012	10:13:48 AM	SiCl4 pre valve closed
4/23/2012	10:13:48 AM	SiCl4 post valve closed
4/23/2012	10:13:48 AM	Main Vac valve closed
4/23/2012	10:13:48 AM	Bubbler valve closed
4/23/2012	10:13:48 AM	Bypass valve opened
4/23/2012	10:13:48 AM	Helium MFC set to  0.000000
4/23/2012	10:13:48 AM	H2 MFC set to  0.000000
4/23/2012	10:13:48 AM	BCl3 MFC set to  0.000000
4/23/2012	10:13:48 AM	PH3 MFC set to  0.000000
4/23/2012	10:13:48 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:13:48 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:13:49 AM	Tube furnace set to 0
4/23/2012	10:14:54 AM	Helium valve closed
4/23/2012	10:14:54 AM	H2 valve closed
4/23/2012	10:14:54 AM	BCl3 valve closed
4/23/2012	10:14:54 AM	PH3 valve closed
4/23/2012	10:14:54 AM	SiCl4 pre valve closed
4/23/2012	10:14:54 AM	SiCl4 post valve closed
4/23/2012	10:14:54 AM	Main Vac valve closed
4/23/2012	10:14:54 AM	Bubbler valve closed
4/23/2012	10:14:54 AM	Bypass valve opened
4/23/2012	10:14:54 AM	Helium MFC set to  0.000000
4/23/2012	10:14:54 AM	H2 MFC set to  0.000000
4/23/2012	10:14:54 AM	BCl3 MFC set to  0.000000
4/23/2012	10:14:54 AM	PH3 MFC set to  0.000000
4/23/2012	10:14:54 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:14:54 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:14:54 AM	Tube furnace set to 0
4/23/2012	10:15:18 AM	Helium valve closed
4/23/2012	10:15:18 AM	H2 valve closed
4/23/2012	10:15:18 AM	BCl3 valve closed
4/23/2012	10:15:18 AM	PH3 valve closed
4/23/2012	10:15:18 AM	SiCl4 pre valve closed
4/23/2012	10:15:18 AM	SiCl4 post valve closed
4/23/2012	10:15:18 AM	Bypass valve closed
4/23/2012	10:15:18 AM	Bubbler valve closed
4/23/2012	10:15:18 AM	Main Vac valve opened
4/23/2012	10:15:18 AM	Helium MFC set to  0.000000
4/23/2012	10:15:18 AM	H2 MFC set to  0.000000
4/23/2012	10:15:18 AM	BCl3 MFC set to  0.000000
4/23/2012	10:15:18 AM	PH3 MFC set to  0.000000
4/23/2012	10:15:18 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:15:18 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:15:19 AM	Tube furnace set to 0
4/23/2012	10:15:20 AM	Run finished at 10:15 AM
4/23/2012	10:15:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	10:15:23 AM	Tube furnace set to 150
4/23/2012	10:19:43 AM	Helium MFC set to  20.000000
4/23/2012	10:19:44 AM	Helium valve opened
4/23/2012	10:19:52 AM	Helium valve closed
4/23/2012	10:47:37 AM	Helium valve opened
4/23/2012	10:49:52 AM	Helium valve closed
4/23/2012	10:51:19 AM	Main Vac valve closed
4/23/2012	10:51:32 AM	Main Vac valve opened
4/23/2012	10:52:18 AM	Recipe started at 10:52 AM
4/23/2012	10:52:18 AM	Helium valve closed
4/23/2012	10:52:18 AM	H2 valve closed
4/23/2012	10:52:18 AM	BCl3 valve closed
4/23/2012	10:52:18 AM	PH3 valve closed
4/23/2012	10:52:18 AM	SiCl4 pre valve closed
4/23/2012	10:52:18 AM	SiCl4 post valve closed
4/23/2012	10:52:18 AM	Main Vac valve closed
4/23/2012	10:52:18 AM	Bypass valve closed
4/23/2012	10:52:18 AM	Bubbler valve closed
4/23/2012	10:52:18 AM	Helium MFC set to  0.000000
4/23/2012	10:52:18 AM	H2 MFC set to  0.000000
4/23/2012	10:52:18 AM	BCl3 MFC set to  0.000000
4/23/2012	10:52:18 AM	PH3 MFC set to  0.000000
4/23/2012	10:52:18 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:52:18 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:52:18 AM	Tube furnace set to 0
4/23/2012	10:52:21 AM	Helium valve closed
4/23/2012	10:52:21 AM	BCl3 valve closed
4/23/2012	10:52:21 AM	PH3 valve closed
4/23/2012	10:52:21 AM	SiCl4 pre valve closed
4/23/2012	10:52:21 AM	SiCl4 post valve closed
4/23/2012	10:52:21 AM	Main Vac valve closed
4/23/2012	10:52:21 AM	Bypass valve closed
4/23/2012	10:52:21 AM	Bubbler valve closed
4/23/2012	10:52:21 AM	H2 valve opened
4/23/2012	10:52:21 AM	Helium MFC set to  0.000000
4/23/2012	10:52:21 AM	H2 MFC set to  500.000000
4/23/2012	10:52:21 AM	BCl3 MFC set to  0.000000
4/23/2012	10:52:21 AM	PH3 MFC set to  0.000000
4/23/2012	10:52:21 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:52:21 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:52:21 AM	Tube furnace set to 0
4/23/2012	10:53:27 AM	Helium valve closed
4/23/2012	10:53:27 AM	BCl3 valve closed
4/23/2012	10:53:27 AM	PH3 valve closed
4/23/2012	10:53:27 AM	SiCl4 pre valve closed
4/23/2012	10:53:27 AM	SiCl4 post valve closed
4/23/2012	10:53:27 AM	Main Vac valve closed
4/23/2012	10:53:27 AM	Bypass valve closed
4/23/2012	10:53:27 AM	H2 valve opened
4/23/2012	10:53:27 AM	Bubbler valve opened
4/23/2012	10:53:27 AM	Helium MFC set to  0.000000
4/23/2012	10:53:27 AM	H2 MFC set to  500.000000
4/23/2012	10:53:27 AM	BCl3 MFC set to  0.000000
4/23/2012	10:53:27 AM	PH3 MFC set to  0.000000
4/23/2012	10:53:27 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:53:27 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:53:27 AM	Tube furnace set to 0
4/23/2012	10:53:28 AM	Helium valve closed
4/23/2012	10:53:28 AM	BCl3 valve closed
4/23/2012	10:53:28 AM	PH3 valve closed
4/23/2012	10:53:28 AM	SiCl4 pre valve closed
4/23/2012	10:53:28 AM	SiCl4 post valve closed
4/23/2012	10:53:28 AM	Main Vac valve closed
4/23/2012	10:53:28 AM	Bypass valve closed
4/23/2012	10:53:28 AM	H2 valve opened
4/23/2012	10:53:28 AM	Bubbler valve opened
4/23/2012	10:53:28 AM	Helium MFC set to  0.000000
4/23/2012	10:53:28 AM	H2 MFC set to  500.000000
4/23/2012	10:53:28 AM	BCl3 MFC set to  0.000000
4/23/2012	10:53:28 AM	PH3 MFC set to  0.000000
4/23/2012	10:53:28 AM	SiCl4 MFC set to  0.000000
4/23/2012	10:53:28 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	10:53:28 AM	Tube furnace set to 1000
4/23/2012	11:13:28 AM	Helium valve closed
4/23/2012	11:13:28 AM	PH3 valve closed
4/23/2012	11:13:28 AM	Main Vac valve closed
4/23/2012	11:13:28 AM	Bypass valve closed
4/23/2012	11:13:28 AM	H2 valve opened
4/23/2012	11:13:28 AM	BCl3 valve opened
4/23/2012	11:13:28 AM	SiCl4 pre valve opened
4/23/2012	11:13:28 AM	SiCl4 post valve opened
4/23/2012	11:13:28 AM	Bubbler valve opened
4/23/2012	11:13:28 AM	Helium MFC set to  0.000000
4/23/2012	11:13:28 AM	H2 MFC set to  450.000000
4/23/2012	11:13:28 AM	BCl3 MFC set to  1.500000
4/23/2012	11:13:28 AM	PH3 MFC set to  0.000000
4/23/2012	11:13:28 AM	SiCl4 MFC set to  50.000000
4/23/2012	11:13:28 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	11:13:28 AM	Tube furnace set to 1000
4/23/2012	11:25:28 AM	Helium valve closed
4/23/2012	11:25:28 AM	BCl3 valve closed
4/23/2012	11:25:28 AM	Main Vac valve closed
4/23/2012	11:25:28 AM	Bypass valve closed
4/23/2012	11:25:28 AM	H2 valve opened
4/23/2012	11:25:28 AM	PH3 valve opened
4/23/2012	11:25:28 AM	SiCl4 pre valve opened
4/23/2012	11:25:28 AM	SiCl4 post valve opened
4/23/2012	11:25:28 AM	Bubbler valve opened
4/23/2012	11:25:28 AM	Helium MFC set to  0.000000
4/23/2012	11:25:28 AM	H2 MFC set to  450.000000
4/23/2012	11:25:28 AM	BCl3 MFC set to  0.000000
4/23/2012	11:25:28 AM	PH3 MFC set to  20.000000
4/23/2012	11:25:28 AM	SiCl4 MFC set to  50.000000
4/23/2012	11:25:28 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	11:25:29 AM	Tube furnace set to 1000
4/23/2012	11:30:29 AM	Helium valve closed
4/23/2012	11:30:29 AM	BCl3 valve closed
4/23/2012	11:30:29 AM	PH3 valve closed
4/23/2012	11:30:29 AM	SiCl4 pre valve closed
4/23/2012	11:30:29 AM	SiCl4 post valve closed
4/23/2012	11:30:29 AM	Main Vac valve closed
4/23/2012	11:30:29 AM	Bypass valve closed
4/23/2012	11:30:29 AM	H2 valve opened
4/23/2012	11:30:29 AM	Bubbler valve opened
4/23/2012	11:30:29 AM	Helium MFC set to  0.000000
4/23/2012	11:30:29 AM	H2 MFC set to  500.000000
4/23/2012	11:30:29 AM	BCl3 MFC set to  0.000000
4/23/2012	11:30:29 AM	PH3 MFC set to  0.000000
4/23/2012	11:30:29 AM	SiCl4 MFC set to  0.000000
4/23/2012	11:30:29 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	11:30:29 AM	Tube furnace set to 950
4/23/2012	11:32:29 AM	Helium valve closed
4/23/2012	11:32:29 AM	BCl3 valve closed
4/23/2012	11:32:29 AM	PH3 valve closed
4/23/2012	11:32:29 AM	SiCl4 pre valve closed
4/23/2012	11:32:29 AM	SiCl4 post valve closed
4/23/2012	11:32:29 AM	Main Vac valve closed
4/23/2012	11:32:29 AM	Bypass valve closed
4/23/2012	11:32:29 AM	H2 valve opened
4/23/2012	11:32:29 AM	Bubbler valve opened
4/23/2012	11:32:29 AM	Helium MFC set to  0.000000
4/23/2012	11:32:29 AM	H2 MFC set to  500.000000
4/23/2012	11:32:29 AM	BCl3 MFC set to  0.000000
4/23/2012	11:32:29 AM	PH3 MFC set to  0.000000
4/23/2012	11:32:29 AM	SiCl4 MFC set to  0.000000
4/23/2012	11:32:29 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	11:32:29 AM	Tube furnace set to 900
4/23/2012	11:34:29 AM	Helium valve closed
4/23/2012	11:34:29 AM	BCl3 valve closed
4/23/2012	11:34:29 AM	PH3 valve closed
4/23/2012	11:34:29 AM	SiCl4 pre valve closed
4/23/2012	11:34:29 AM	SiCl4 post valve closed
4/23/2012	11:34:29 AM	Main Vac valve closed
4/23/2012	11:34:29 AM	Bypass valve closed
4/23/2012	11:34:29 AM	H2 valve opened
4/23/2012	11:34:29 AM	Bubbler valve opened
4/23/2012	11:34:29 AM	Helium MFC set to  0.000000
4/23/2012	11:34:29 AM	H2 MFC set to  500.000000
4/23/2012	11:34:29 AM	BCl3 MFC set to  0.000000
4/23/2012	11:34:29 AM	PH3 MFC set to  0.000000
4/23/2012	11:34:29 AM	SiCl4 MFC set to  0.000000
4/23/2012	11:34:29 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	11:34:29 AM	Tube furnace set to 850
4/23/2012	11:36:29 AM	H2 valve closed
4/23/2012	11:36:29 AM	BCl3 valve closed
4/23/2012	11:36:29 AM	PH3 valve closed
4/23/2012	11:36:29 AM	SiCl4 pre valve closed
4/23/2012	11:36:29 AM	SiCl4 post valve closed
4/23/2012	11:36:29 AM	Main Vac valve closed
4/23/2012	11:36:29 AM	Bypass valve closed
4/23/2012	11:36:29 AM	Helium valve opened
4/23/2012	11:36:29 AM	Bubbler valve opened
4/23/2012	11:36:29 AM	Helium MFC set to  500.000000
4/23/2012	11:36:29 AM	H2 MFC set to  0.000000
4/23/2012	11:36:29 AM	BCl3 MFC set to  0.000000
4/23/2012	11:36:29 AM	PH3 MFC set to  0.000000
4/23/2012	11:36:29 AM	SiCl4 MFC set to  0.000000
4/23/2012	11:36:29 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	11:36:29 AM	Tube furnace set to 800
4/23/2012	11:38:29 AM	H2 valve closed
4/23/2012	11:38:29 AM	BCl3 valve closed
4/23/2012	11:38:29 AM	PH3 valve closed
4/23/2012	11:38:29 AM	SiCl4 pre valve closed
4/23/2012	11:38:30 AM	SiCl4 post valve closed
4/23/2012	11:38:30 AM	Main Vac valve closed
4/23/2012	11:38:30 AM	Bypass valve closed
4/23/2012	11:38:30 AM	Helium valve opened
4/23/2012	11:38:30 AM	Bubbler valve opened
4/23/2012	11:38:30 AM	Helium MFC set to  500.000000
4/23/2012	11:38:30 AM	H2 MFC set to  0.000000
4/23/2012	11:38:30 AM	BCl3 MFC set to  0.000000
4/23/2012	11:38:30 AM	PH3 MFC set to  0.000000
4/23/2012	11:38:30 AM	SiCl4 MFC set to  0.000000
4/23/2012	11:38:30 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	11:38:30 AM	Tube furnace set to 750
4/23/2012	11:40:30 AM	H2 valve closed
4/23/2012	11:40:30 AM	BCl3 valve closed
4/23/2012	11:40:30 AM	PH3 valve closed
4/23/2012	11:40:30 AM	SiCl4 pre valve closed
4/23/2012	11:40:30 AM	SiCl4 post valve closed
4/23/2012	11:40:30 AM	Main Vac valve closed
4/23/2012	11:40:30 AM	Bypass valve closed
4/23/2012	11:40:30 AM	Helium valve opened
4/23/2012	11:40:30 AM	Bubbler valve opened
4/23/2012	11:40:30 AM	Helium MFC set to  500.000000
4/23/2012	11:40:30 AM	H2 MFC set to  0.000000
4/23/2012	11:40:30 AM	BCl3 MFC set to  0.000000
4/23/2012	11:40:30 AM	PH3 MFC set to  0.000000
4/23/2012	11:40:30 AM	SiCl4 MFC set to  0.000000
4/23/2012	11:40:30 AM	Bypass solenoid MFC set to  0.000000
4/23/2012	11:40:30 AM	Tube furnace set to 0
4/23/2012	12:00:30 PM	Helium valve closed
4/23/2012	12:00:30 PM	H2 valve closed
4/23/2012	12:00:30 PM	BCl3 valve closed
4/23/2012	12:00:30 PM	PH3 valve closed
4/23/2012	12:00:30 PM	SiCl4 pre valve closed
4/23/2012	12:00:30 PM	SiCl4 post valve closed
4/23/2012	12:00:30 PM	Main Vac valve closed
4/23/2012	12:00:30 PM	Bypass valve closed
4/23/2012	12:00:30 PM	Bubbler valve closed
4/23/2012	12:00:30 PM	Helium MFC set to  0.000000
4/23/2012	12:00:30 PM	H2 MFC set to  0.000000
4/23/2012	12:00:30 PM	BCl3 MFC set to  0.000000
4/23/2012	12:00:30 PM	PH3 MFC set to  0.000000
4/23/2012	12:00:30 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:00:30 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:00:30 PM	Tube furnace set to 0
4/23/2012	12:00:31 PM	Helium valve closed
4/23/2012	12:00:31 PM	H2 valve closed
4/23/2012	12:00:31 PM	BCl3 valve closed
4/23/2012	12:00:31 PM	PH3 valve closed
4/23/2012	12:00:31 PM	SiCl4 pre valve closed
4/23/2012	12:00:31 PM	SiCl4 post valve closed
4/23/2012	12:00:31 PM	Main Vac valve closed
4/23/2012	12:00:31 PM	Bubbler valve closed
4/23/2012	12:00:31 PM	Bypass valve opened
4/23/2012	12:00:31 PM	Helium MFC set to  0.000000
4/23/2012	12:00:31 PM	H2 MFC set to  0.000000
4/23/2012	12:00:31 PM	BCl3 MFC set to  0.000000
4/23/2012	12:00:31 PM	PH3 MFC set to  0.000000
4/23/2012	12:00:31 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:00:31 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:00:31 PM	Tube furnace set to 0
4/23/2012	12:01:17 PM	Helium valve closed
4/23/2012	12:01:17 PM	H2 valve closed
4/23/2012	12:01:17 PM	BCl3 valve closed
4/23/2012	12:01:17 PM	PH3 valve closed
4/23/2012	12:01:17 PM	SiCl4 pre valve closed
4/23/2012	12:01:17 PM	SiCl4 post valve closed
4/23/2012	12:01:17 PM	Main Vac valve closed
4/23/2012	12:01:17 PM	Bubbler valve closed
4/23/2012	12:01:17 PM	Bypass valve opened
4/23/2012	12:01:17 PM	Helium MFC set to  0.000000
4/23/2012	12:01:17 PM	H2 MFC set to  0.000000
4/23/2012	12:01:17 PM	BCl3 MFC set to  0.000000
4/23/2012	12:01:17 PM	PH3 MFC set to  0.000000
4/23/2012	12:01:17 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:01:17 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:01:18 PM	Tube furnace set to 0
4/23/2012	12:02:18 PM	Helium valve closed
4/23/2012	12:02:18 PM	H2 valve closed
4/23/2012	12:02:18 PM	BCl3 valve closed
4/23/2012	12:02:18 PM	PH3 valve closed
4/23/2012	12:02:18 PM	SiCl4 pre valve closed
4/23/2012	12:02:18 PM	SiCl4 post valve closed
4/23/2012	12:02:18 PM	Bypass valve closed
4/23/2012	12:02:18 PM	Bubbler valve closed
4/23/2012	12:02:18 PM	Main Vac valve opened
4/23/2012	12:02:18 PM	Helium MFC set to  0.000000
4/23/2012	12:02:18 PM	H2 MFC set to  0.000000
4/23/2012	12:02:18 PM	BCl3 MFC set to  0.000000
4/23/2012	12:02:18 PM	PH3 MFC set to  0.000000
4/23/2012	12:02:18 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:02:18 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:02:18 PM	Tube furnace set to 0
4/23/2012	12:02:19 PM	Run finished at 12:02 PM
4/23/2012	12:14:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	12:14:10 PM	Recipe started at 12:14 PM
4/23/2012	12:14:10 PM	Helium valve closed
4/23/2012	12:14:10 PM	H2 valve closed
4/23/2012	12:14:10 PM	BCl3 valve closed
4/23/2012	12:14:10 PM	PH3 valve closed
4/23/2012	12:14:10 PM	SiCl4 pre valve closed
4/23/2012	12:14:10 PM	SiCl4 post valve closed
4/23/2012	12:14:10 PM	Main Vac valve closed
4/23/2012	12:14:10 PM	Bypass valve closed
4/23/2012	12:14:10 PM	Bubbler valve closed
4/23/2012	12:14:10 PM	Helium MFC set to  0.000000
4/23/2012	12:14:10 PM	H2 MFC set to  0.000000
4/23/2012	12:14:10 PM	BCl3 MFC set to  0.000000
4/23/2012	12:14:10 PM	PH3 MFC set to  0.000000
4/23/2012	12:14:10 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:14:10 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:14:11 PM	Tube furnace set to 0
4/23/2012	12:14:14 PM	H2 valve closed
4/23/2012	12:14:14 PM	BCl3 valve closed
4/23/2012	12:14:14 PM	PH3 valve closed
4/23/2012	12:14:14 PM	SiCl4 pre valve closed
4/23/2012	12:14:14 PM	SiCl4 post valve closed
4/23/2012	12:14:14 PM	Main Vac valve closed
4/23/2012	12:14:14 PM	Bypass valve closed
4/23/2012	12:14:14 PM	Bubbler valve closed
4/23/2012	12:14:14 PM	Helium valve opened
4/23/2012	12:14:14 PM	Helium MFC set to  500.000000
4/23/2012	12:14:14 PM	H2 MFC set to  0.000000
4/23/2012	12:14:14 PM	BCl3 MFC set to  0.000000
4/23/2012	12:14:14 PM	PH3 MFC set to  0.000000
4/23/2012	12:14:14 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:14:14 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:14:14 PM	Tube furnace set to 0
4/23/2012	12:15:13 PM	Helium valve closed
4/23/2012	12:15:13 PM	H2 valve closed
4/23/2012	12:15:13 PM	BCl3 valve closed
4/23/2012	12:15:13 PM	PH3 valve closed
4/23/2012	12:15:13 PM	SiCl4 pre valve closed
4/23/2012	12:15:13 PM	SiCl4 post valve closed
4/23/2012	12:15:13 PM	Main Vac valve closed
4/23/2012	12:15:13 PM	Bypass valve closed
4/23/2012	12:15:13 PM	Bubbler valve closed
4/23/2012	12:15:13 PM	Helium MFC set to  0.000000
4/23/2012	12:15:13 PM	H2 MFC set to  0.000000
4/23/2012	12:15:13 PM	BCl3 MFC set to  0.000000
4/23/2012	12:15:13 PM	PH3 MFC set to  0.000000
4/23/2012	12:15:13 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:15:13 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:15:13 PM	Tube furnace set to 0
4/23/2012	12:15:14 PM	Run finished at 12:15 PM
4/23/2012	12:15:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	12:18:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	12:18:07 PM	Recipe started at 12:18 PM
4/23/2012	12:18:07 PM	Helium valve closed
4/23/2012	12:18:07 PM	H2 valve closed
4/23/2012	12:18:07 PM	BCl3 valve closed
4/23/2012	12:18:07 PM	PH3 valve closed
4/23/2012	12:18:07 PM	SiCl4 pre valve closed
4/23/2012	12:18:07 PM	SiCl4 post valve closed
4/23/2012	12:18:07 PM	Main Vac valve closed
4/23/2012	12:18:07 PM	Bubbler valve closed
4/23/2012	12:18:07 PM	Bypass valve opened
4/23/2012	12:18:07 PM	Helium MFC set to  0.000000
4/23/2012	12:18:07 PM	H2 MFC set to  0.000000
4/23/2012	12:18:07 PM	BCl3 MFC set to  0.000000
4/23/2012	12:18:07 PM	PH3 MFC set to  0.000000
4/23/2012	12:18:07 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:18:07 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:18:07 PM	Tube furnace set to 0
4/23/2012	12:19:04 PM	Helium valve closed
4/23/2012	12:19:04 PM	H2 valve closed
4/23/2012	12:19:04 PM	BCl3 valve closed
4/23/2012	12:19:04 PM	PH3 valve closed
4/23/2012	12:19:04 PM	SiCl4 pre valve closed
4/23/2012	12:19:04 PM	SiCl4 post valve closed
4/23/2012	12:19:04 PM	Main Vac valve closed
4/23/2012	12:19:04 PM	Bubbler valve closed
4/23/2012	12:19:04 PM	Bypass valve opened
4/23/2012	12:19:04 PM	Helium MFC set to  0.000000
4/23/2012	12:19:04 PM	H2 MFC set to  0.000000
4/23/2012	12:19:04 PM	BCl3 MFC set to  0.000000
4/23/2012	12:19:04 PM	PH3 MFC set to  0.000000
4/23/2012	12:19:04 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:19:04 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:19:04 PM	Tube furnace set to 0
4/23/2012	12:19:18 PM	Helium valve closed
4/23/2012	12:19:18 PM	H2 valve closed
4/23/2012	12:19:18 PM	BCl3 valve closed
4/23/2012	12:19:18 PM	PH3 valve closed
4/23/2012	12:19:18 PM	SiCl4 pre valve closed
4/23/2012	12:19:18 PM	SiCl4 post valve closed
4/23/2012	12:19:18 PM	Bypass valve closed
4/23/2012	12:19:18 PM	Bubbler valve closed
4/23/2012	12:19:18 PM	Main Vac valve opened
4/23/2012	12:19:18 PM	Helium MFC set to  0.000000
4/23/2012	12:19:18 PM	H2 MFC set to  0.000000
4/23/2012	12:19:18 PM	BCl3 MFC set to  0.000000
4/23/2012	12:19:18 PM	PH3 MFC set to  0.000000
4/23/2012	12:19:18 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:19:18 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:19:18 PM	Tube furnace set to 0
4/23/2012	12:19:19 PM	Run finished at 12:19 PM
4/23/2012	12:19:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	12:32:26 PM	Helium MFC set to  20.000000
4/23/2012	12:32:28 PM	Helium valve opened
4/23/2012	12:37:54 PM	Helium valve closed
4/23/2012	12:38:21 PM	Main Vac valve closed
4/23/2012	12:38:29 PM	Main Vac valve opened
4/23/2012	12:38:30 PM	Helium valve opened
4/23/2012	12:39:16 PM	Helium valve closed
4/23/2012	12:39:39 PM	Recipe started at 12:39 PM
4/23/2012	12:39:39 PM	Helium valve closed
4/23/2012	12:39:39 PM	H2 valve closed
4/23/2012	12:39:39 PM	BCl3 valve closed
4/23/2012	12:39:39 PM	PH3 valve closed
4/23/2012	12:39:39 PM	SiCl4 pre valve closed
4/23/2012	12:39:39 PM	SiCl4 post valve closed
4/23/2012	12:39:39 PM	Bypass valve closed
4/23/2012	12:39:39 PM	Bubbler valve closed
4/23/2012	12:39:39 PM	Main Vac valve opened
4/23/2012	12:39:39 PM	Helium MFC set to  0.000000
4/23/2012	12:39:39 PM	H2 MFC set to  0.000000
4/23/2012	12:39:39 PM	BCl3 MFC set to  0.000000
4/23/2012	12:39:39 PM	PH3 MFC set to  0.000000
4/23/2012	12:39:39 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:39:39 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:39:39 PM	Tube furnace set to 0
4/23/2012	12:54:39 PM	Helium valve closed
4/23/2012	12:54:39 PM	H2 valve closed
4/23/2012	12:54:39 PM	BCl3 valve closed
4/23/2012	12:54:39 PM	PH3 valve closed
4/23/2012	12:54:40 PM	SiCl4 pre valve closed
4/23/2012	12:54:40 PM	SiCl4 post valve closed
4/23/2012	12:54:40 PM	Main Vac valve closed
4/23/2012	12:54:40 PM	Bypass valve closed
4/23/2012	12:54:40 PM	Bubbler valve closed
4/23/2012	12:54:40 PM	Helium MFC set to  0.000000
4/23/2012	12:54:40 PM	H2 MFC set to  0.000000
4/23/2012	12:54:40 PM	BCl3 MFC set to  0.000000
4/23/2012	12:54:40 PM	PH3 MFC set to  0.000000
4/23/2012	12:54:40 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:54:40 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:54:40 PM	Tube furnace set to 0
4/23/2012	12:54:43 PM	Helium valve closed
4/23/2012	12:54:43 PM	BCl3 valve closed
4/23/2012	12:54:43 PM	PH3 valve closed
4/23/2012	12:54:43 PM	SiCl4 pre valve closed
4/23/2012	12:54:43 PM	SiCl4 post valve closed
4/23/2012	12:54:43 PM	Main Vac valve closed
4/23/2012	12:54:43 PM	Bypass valve closed
4/23/2012	12:54:43 PM	Bubbler valve closed
4/23/2012	12:54:43 PM	H2 valve opened
4/23/2012	12:54:43 PM	Helium MFC set to  0.000000
4/23/2012	12:54:43 PM	H2 MFC set to  500.000000
4/23/2012	12:54:43 PM	BCl3 MFC set to  0.000000
4/23/2012	12:54:43 PM	PH3 MFC set to  0.000000
4/23/2012	12:54:43 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:54:43 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:54:43 PM	Tube furnace set to 0
4/23/2012	12:55:47 PM	Helium valve closed
4/23/2012	12:55:47 PM	BCl3 valve closed
4/23/2012	12:55:47 PM	PH3 valve closed
4/23/2012	12:55:47 PM	SiCl4 pre valve closed
4/23/2012	12:55:47 PM	SiCl4 post valve closed
4/23/2012	12:55:47 PM	Main Vac valve closed
4/23/2012	12:55:47 PM	Bypass valve closed
4/23/2012	12:55:47 PM	H2 valve opened
4/23/2012	12:55:47 PM	Bubbler valve opened
4/23/2012	12:55:47 PM	Helium MFC set to  0.000000
4/23/2012	12:55:47 PM	H2 MFC set to  500.000000
4/23/2012	12:55:47 PM	BCl3 MFC set to  0.000000
4/23/2012	12:55:47 PM	PH3 MFC set to  0.000000
4/23/2012	12:55:47 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:55:47 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:55:47 PM	Tube furnace set to 0
4/23/2012	12:55:48 PM	Helium valve closed
4/23/2012	12:55:48 PM	BCl3 valve closed
4/23/2012	12:55:48 PM	PH3 valve closed
4/23/2012	12:55:48 PM	SiCl4 pre valve closed
4/23/2012	12:55:48 PM	SiCl4 post valve closed
4/23/2012	12:55:48 PM	Main Vac valve closed
4/23/2012	12:55:48 PM	Bypass valve closed
4/23/2012	12:55:48 PM	H2 valve opened
4/23/2012	12:55:48 PM	Bubbler valve opened
4/23/2012	12:55:48 PM	Helium MFC set to  0.000000
4/23/2012	12:55:48 PM	H2 MFC set to  500.000000
4/23/2012	12:55:48 PM	BCl3 MFC set to  0.000000
4/23/2012	12:55:48 PM	PH3 MFC set to  0.000000
4/23/2012	12:55:48 PM	SiCl4 MFC set to  0.000000
4/23/2012	12:55:48 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	12:55:48 PM	Tube furnace set to 1000
4/23/2012	1:15:48 PM	Helium valve closed
4/23/2012	1:15:48 PM	PH3 valve closed
4/23/2012	1:15:48 PM	Main Vac valve closed
4/23/2012	1:15:48 PM	Bypass valve closed
4/23/2012	1:15:48 PM	H2 valve opened
4/23/2012	1:15:48 PM	BCl3 valve opened
4/23/2012	1:15:48 PM	SiCl4 pre valve opened
4/23/2012	1:15:48 PM	SiCl4 post valve opened
4/23/2012	1:15:48 PM	Bubbler valve opened
4/23/2012	1:15:48 PM	Helium MFC set to  0.000000
4/23/2012	1:15:48 PM	H2 MFC set to  450.000000
4/23/2012	1:15:48 PM	BCl3 MFC set to  1.500000
4/23/2012	1:15:48 PM	PH3 MFC set to  0.000000
4/23/2012	1:15:48 PM	SiCl4 MFC set to  50.000000
4/23/2012	1:15:48 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	1:15:49 PM	Tube furnace set to 1000
4/23/2012	1:27:49 PM	Helium valve closed
4/23/2012	1:27:49 PM	BCl3 valve closed
4/23/2012	1:27:49 PM	Main Vac valve closed
4/23/2012	1:27:49 PM	Bypass valve closed
4/23/2012	1:27:49 PM	H2 valve opened
4/23/2012	1:27:49 PM	PH3 valve opened
4/23/2012	1:27:49 PM	SiCl4 pre valve opened
4/23/2012	1:27:49 PM	SiCl4 post valve opened
4/23/2012	1:27:49 PM	Bubbler valve opened
4/23/2012	1:27:49 PM	Helium MFC set to  0.000000
4/23/2012	1:27:49 PM	H2 MFC set to  450.000000
4/23/2012	1:27:49 PM	BCl3 MFC set to  0.000000
4/23/2012	1:27:49 PM	PH3 MFC set to  20.000000
4/23/2012	1:27:49 PM	SiCl4 MFC set to  50.000000
4/23/2012	1:27:49 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	1:27:49 PM	Tube furnace set to 1000
4/23/2012	1:32:49 PM	Helium valve closed
4/23/2012	1:32:49 PM	BCl3 valve closed
4/23/2012	1:32:49 PM	PH3 valve closed
4/23/2012	1:32:49 PM	SiCl4 pre valve closed
4/23/2012	1:32:49 PM	SiCl4 post valve closed
4/23/2012	1:32:49 PM	Main Vac valve closed
4/23/2012	1:32:49 PM	Bypass valve closed
4/23/2012	1:32:49 PM	H2 valve opened
4/23/2012	1:32:49 PM	Bubbler valve opened
4/23/2012	1:32:49 PM	Helium MFC set to  0.000000
4/23/2012	1:32:49 PM	H2 MFC set to  500.000000
4/23/2012	1:32:49 PM	BCl3 MFC set to  0.000000
4/23/2012	1:32:49 PM	PH3 MFC set to  0.000000
4/23/2012	1:32:49 PM	SiCl4 MFC set to  0.000000
4/23/2012	1:32:49 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	1:32:49 PM	Tube furnace set to 950
4/23/2012	1:34:49 PM	Helium valve closed
4/23/2012	1:34:49 PM	BCl3 valve closed
4/23/2012	1:34:49 PM	PH3 valve closed
4/23/2012	1:34:49 PM	SiCl4 pre valve closed
4/23/2012	1:34:49 PM	SiCl4 post valve closed
4/23/2012	1:34:49 PM	Main Vac valve closed
4/23/2012	1:34:49 PM	Bypass valve closed
4/23/2012	1:34:49 PM	H2 valve opened
4/23/2012	1:34:49 PM	Bubbler valve opened
4/23/2012	1:34:49 PM	Helium MFC set to  0.000000
4/23/2012	1:34:49 PM	H2 MFC set to  500.000000
4/23/2012	1:34:49 PM	BCl3 MFC set to  0.000000
4/23/2012	1:34:49 PM	PH3 MFC set to  0.000000
4/23/2012	1:34:49 PM	SiCl4 MFC set to  0.000000
4/23/2012	1:34:49 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	1:34:49 PM	Tube furnace set to 900
4/23/2012	1:36:49 PM	Helium valve closed
4/23/2012	1:36:49 PM	BCl3 valve closed
4/23/2012	1:36:49 PM	PH3 valve closed
4/23/2012	1:36:49 PM	SiCl4 pre valve closed
4/23/2012	1:36:49 PM	SiCl4 post valve closed
4/23/2012	1:36:49 PM	Main Vac valve closed
4/23/2012	1:36:49 PM	Bypass valve closed
4/23/2012	1:36:49 PM	H2 valve opened
4/23/2012	1:36:49 PM	Bubbler valve opened
4/23/2012	1:36:49 PM	Helium MFC set to  0.000000
4/23/2012	1:36:49 PM	H2 MFC set to  500.000000
4/23/2012	1:36:49 PM	BCl3 MFC set to  0.000000
4/23/2012	1:36:49 PM	PH3 MFC set to  0.000000
4/23/2012	1:36:49 PM	SiCl4 MFC set to  0.000000
4/23/2012	1:36:49 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	1:36:49 PM	Tube furnace set to 850
4/23/2012	1:38:49 PM	H2 valve closed
4/23/2012	1:38:49 PM	BCl3 valve closed
4/23/2012	1:38:49 PM	PH3 valve closed
4/23/2012	1:38:49 PM	SiCl4 pre valve closed
4/23/2012	1:38:49 PM	SiCl4 post valve closed
4/23/2012	1:38:49 PM	Main Vac valve closed
4/23/2012	1:38:49 PM	Bypass valve closed
4/23/2012	1:38:49 PM	Helium valve opened
4/23/2012	1:38:49 PM	Bubbler valve opened
4/23/2012	1:38:49 PM	Helium MFC set to  500.000000
4/23/2012	1:38:49 PM	H2 MFC set to  0.000000
4/23/2012	1:38:49 PM	BCl3 MFC set to  0.000000
4/23/2012	1:38:49 PM	PH3 MFC set to  0.000000
4/23/2012	1:38:49 PM	SiCl4 MFC set to  0.000000
4/23/2012	1:38:49 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	1:38:50 PM	Tube furnace set to 800
4/23/2012	1:40:50 PM	H2 valve closed
4/23/2012	1:40:50 PM	BCl3 valve closed
4/23/2012	1:40:50 PM	PH3 valve closed
4/23/2012	1:40:50 PM	SiCl4 pre valve closed
4/23/2012	1:40:50 PM	SiCl4 post valve closed
4/23/2012	1:40:50 PM	Main Vac valve closed
4/23/2012	1:40:50 PM	Bypass valve closed
4/23/2012	1:40:50 PM	Helium valve opened
4/23/2012	1:40:50 PM	Bubbler valve opened
4/23/2012	1:40:50 PM	Helium MFC set to  500.000000
4/23/2012	1:40:50 PM	H2 MFC set to  0.000000
4/23/2012	1:40:50 PM	BCl3 MFC set to  0.000000
4/23/2012	1:40:50 PM	PH3 MFC set to  0.000000
4/23/2012	1:40:50 PM	SiCl4 MFC set to  0.000000
4/23/2012	1:40:50 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	1:40:50 PM	Tube furnace set to 750
4/23/2012	1:42:50 PM	H2 valve closed
4/23/2012	1:42:50 PM	BCl3 valve closed
4/23/2012	1:42:50 PM	PH3 valve closed
4/23/2012	1:42:50 PM	SiCl4 pre valve closed
4/23/2012	1:42:50 PM	SiCl4 post valve closed
4/23/2012	1:42:50 PM	Main Vac valve closed
4/23/2012	1:42:50 PM	Bypass valve closed
4/23/2012	1:42:50 PM	Helium valve opened
4/23/2012	1:42:50 PM	Bubbler valve opened
4/23/2012	1:42:50 PM	Helium MFC set to  500.000000
4/23/2012	1:42:50 PM	H2 MFC set to  0.000000
4/23/2012	1:42:50 PM	BCl3 MFC set to  0.000000
4/23/2012	1:42:50 PM	PH3 MFC set to  0.000000
4/23/2012	1:42:50 PM	SiCl4 MFC set to  0.000000
4/23/2012	1:42:50 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	1:42:50 PM	Tube furnace set to 0
4/23/2012	2:02:50 PM	Helium valve closed
4/23/2012	2:02:50 PM	H2 valve closed
4/23/2012	2:02:50 PM	BCl3 valve closed
4/23/2012	2:02:50 PM	PH3 valve closed
4/23/2012	2:02:50 PM	SiCl4 pre valve closed
4/23/2012	2:02:50 PM	SiCl4 post valve closed
4/23/2012	2:02:50 PM	Main Vac valve closed
4/23/2012	2:02:50 PM	Bypass valve closed
4/23/2012	2:02:50 PM	Bubbler valve closed
4/23/2012	2:02:50 PM	Helium MFC set to  0.000000
4/23/2012	2:02:50 PM	H2 MFC set to  0.000000
4/23/2012	2:02:50 PM	BCl3 MFC set to  0.000000
4/23/2012	2:02:50 PM	PH3 MFC set to  0.000000
4/23/2012	2:02:50 PM	SiCl4 MFC set to  0.000000
4/23/2012	2:02:50 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	2:02:50 PM	Tube furnace set to 0
4/23/2012	2:02:51 PM	Helium valve closed
4/23/2012	2:02:51 PM	H2 valve closed
4/23/2012	2:02:51 PM	BCl3 valve closed
4/23/2012	2:02:51 PM	PH3 valve closed
4/23/2012	2:02:51 PM	SiCl4 pre valve closed
4/23/2012	2:02:51 PM	SiCl4 post valve closed
4/23/2012	2:02:51 PM	Main Vac valve closed
4/23/2012	2:02:51 PM	Bubbler valve closed
4/23/2012	2:02:51 PM	Bypass valve opened
4/23/2012	2:02:51 PM	Helium MFC set to  0.000000
4/23/2012	2:02:51 PM	H2 MFC set to  0.000000
4/23/2012	2:02:51 PM	BCl3 MFC set to  0.000000
4/23/2012	2:02:51 PM	PH3 MFC set to  0.000000
4/23/2012	2:02:51 PM	SiCl4 MFC set to  0.000000
4/23/2012	2:02:51 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	2:02:52 PM	Tube furnace set to 0
4/23/2012	2:03:37 PM	Helium valve closed
4/23/2012	2:03:37 PM	H2 valve closed
4/23/2012	2:03:37 PM	BCl3 valve closed
4/23/2012	2:03:37 PM	PH3 valve closed
4/23/2012	2:03:37 PM	SiCl4 pre valve closed
4/23/2012	2:03:37 PM	SiCl4 post valve closed
4/23/2012	2:03:37 PM	Main Vac valve closed
4/23/2012	2:03:37 PM	Bubbler valve closed
4/23/2012	2:03:37 PM	Bypass valve opened
4/23/2012	2:03:37 PM	Helium MFC set to  0.000000
4/23/2012	2:03:37 PM	H2 MFC set to  0.000000
4/23/2012	2:03:37 PM	BCl3 MFC set to  0.000000
4/23/2012	2:03:37 PM	PH3 MFC set to  0.000000
4/23/2012	2:03:37 PM	SiCl4 MFC set to  0.000000
4/23/2012	2:03:37 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	2:03:37 PM	Tube furnace set to 0
4/23/2012	2:04:37 PM	Helium valve closed
4/23/2012	2:04:37 PM	H2 valve closed
4/23/2012	2:04:37 PM	BCl3 valve closed
4/23/2012	2:04:37 PM	PH3 valve closed
4/23/2012	2:04:37 PM	SiCl4 pre valve closed
4/23/2012	2:04:37 PM	SiCl4 post valve closed
4/23/2012	2:04:37 PM	Bypass valve closed
4/23/2012	2:04:37 PM	Bubbler valve closed
4/23/2012	2:04:37 PM	Main Vac valve opened
4/23/2012	2:04:37 PM	Helium MFC set to  0.000000
4/23/2012	2:04:37 PM	H2 MFC set to  0.000000
4/23/2012	2:04:37 PM	BCl3 MFC set to  0.000000
4/23/2012	2:04:37 PM	PH3 MFC set to  0.000000
4/23/2012	2:04:37 PM	SiCl4 MFC set to  0.000000
4/23/2012	2:04:37 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	2:04:38 PM	Tube furnace set to 0
4/23/2012	2:04:39 PM	Run finished at 2:04 PM
4/23/2012	3:28:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	3:28:39 PM	Recipe started at 3:28 PM
4/23/2012	3:28:39 PM	Helium valve closed
4/23/2012	3:28:39 PM	H2 valve closed
4/23/2012	3:28:39 PM	BCl3 valve closed
4/23/2012	3:28:39 PM	PH3 valve closed
4/23/2012	3:28:39 PM	SiCl4 pre valve closed
4/23/2012	3:28:39 PM	SiCl4 post valve closed
4/23/2012	3:28:39 PM	Main Vac valve closed
4/23/2012	3:28:39 PM	Bypass valve closed
4/23/2012	3:28:39 PM	Bubbler valve closed
4/23/2012	3:28:39 PM	Helium MFC set to  0.000000
4/23/2012	3:28:39 PM	H2 MFC set to  0.000000
4/23/2012	3:28:39 PM	BCl3 MFC set to  0.000000
4/23/2012	3:28:39 PM	PH3 MFC set to  0.000000
4/23/2012	3:28:39 PM	SiCl4 MFC set to  0.000000
4/23/2012	3:28:39 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	3:28:39 PM	Tube furnace set to 0
4/23/2012	3:28:42 PM	H2 valve closed
4/23/2012	3:28:42 PM	BCl3 valve closed
4/23/2012	3:28:42 PM	PH3 valve closed
4/23/2012	3:28:42 PM	SiCl4 pre valve closed
4/23/2012	3:28:42 PM	SiCl4 post valve closed
4/23/2012	3:28:42 PM	Main Vac valve closed
4/23/2012	3:28:42 PM	Bypass valve closed
4/23/2012	3:28:42 PM	Bubbler valve closed
4/23/2012	3:28:42 PM	Helium valve opened
4/23/2012	3:28:43 PM	Helium MFC set to  500.000000
4/23/2012	3:28:43 PM	H2 MFC set to  0.000000
4/23/2012	3:28:43 PM	BCl3 MFC set to  0.000000
4/23/2012	3:28:43 PM	PH3 MFC set to  0.000000
4/23/2012	3:28:43 PM	SiCl4 MFC set to  0.000000
4/23/2012	3:28:43 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	3:28:43 PM	Tube furnace set to 0
4/23/2012	3:29:44 PM	Helium valve closed
4/23/2012	3:29:44 PM	H2 valve closed
4/23/2012	3:29:44 PM	BCl3 valve closed
4/23/2012	3:29:44 PM	PH3 valve closed
4/23/2012	3:29:44 PM	SiCl4 pre valve closed
4/23/2012	3:29:44 PM	SiCl4 post valve closed
4/23/2012	3:29:44 PM	Main Vac valve closed
4/23/2012	3:29:44 PM	Bypass valve closed
4/23/2012	3:29:44 PM	Bubbler valve closed
4/23/2012	3:29:44 PM	Helium MFC set to  0.000000
4/23/2012	3:29:44 PM	H2 MFC set to  0.000000
4/23/2012	3:29:44 PM	BCl3 MFC set to  0.000000
4/23/2012	3:29:44 PM	PH3 MFC set to  0.000000
4/23/2012	3:29:44 PM	SiCl4 MFC set to  0.000000
4/23/2012	3:29:44 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	3:29:44 PM	Tube furnace set to 0
4/23/2012	3:29:45 PM	Run finished at 3:29 PM
4/23/2012	3:29:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	3:32:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	3:32:05 PM	Recipe started at 3:32 PM
4/23/2012	3:32:05 PM	Helium valve closed
4/23/2012	3:32:05 PM	H2 valve closed
4/23/2012	3:32:05 PM	BCl3 valve closed
4/23/2012	3:32:05 PM	PH3 valve closed
4/23/2012	3:32:05 PM	SiCl4 pre valve closed
4/23/2012	3:32:05 PM	SiCl4 post valve closed
4/23/2012	3:32:05 PM	Main Vac valve closed
4/23/2012	3:32:05 PM	Bubbler valve closed
4/23/2012	3:32:05 PM	Bypass valve opened
4/23/2012	3:32:05 PM	Helium MFC set to  0.000000
4/23/2012	3:32:05 PM	H2 MFC set to  0.000000
4/23/2012	3:32:05 PM	BCl3 MFC set to  0.000000
4/23/2012	3:32:05 PM	PH3 MFC set to  0.000000
4/23/2012	3:32:05 PM	SiCl4 MFC set to  0.000000
4/23/2012	3:32:05 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	3:32:06 PM	Tube furnace set to 0
4/23/2012	3:33:05 PM	Helium valve closed
4/23/2012	3:33:05 PM	H2 valve closed
4/23/2012	3:33:05 PM	BCl3 valve closed
4/23/2012	3:33:05 PM	PH3 valve closed
4/23/2012	3:33:05 PM	SiCl4 pre valve closed
4/23/2012	3:33:05 PM	SiCl4 post valve closed
4/23/2012	3:33:05 PM	Main Vac valve closed
4/23/2012	3:33:05 PM	Bubbler valve closed
4/23/2012	3:33:05 PM	Bypass valve opened
4/23/2012	3:33:05 PM	Helium MFC set to  0.000000
4/23/2012	3:33:05 PM	H2 MFC set to  0.000000
4/23/2012	3:33:05 PM	BCl3 MFC set to  0.000000
4/23/2012	3:33:05 PM	PH3 MFC set to  0.000000
4/23/2012	3:33:05 PM	SiCl4 MFC set to  0.000000
4/23/2012	3:33:05 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	3:33:05 PM	Tube furnace set to 0
4/23/2012	3:33:15 PM	Helium valve closed
4/23/2012	3:33:15 PM	H2 valve closed
4/23/2012	3:33:15 PM	BCl3 valve closed
4/23/2012	3:33:15 PM	PH3 valve closed
4/23/2012	3:33:15 PM	SiCl4 pre valve closed
4/23/2012	3:33:15 PM	SiCl4 post valve closed
4/23/2012	3:33:15 PM	Bypass valve closed
4/23/2012	3:33:15 PM	Bubbler valve closed
4/23/2012	3:33:15 PM	Main Vac valve opened
4/23/2012	3:33:15 PM	Helium MFC set to  0.000000
4/23/2012	3:33:15 PM	H2 MFC set to  0.000000
4/23/2012	3:33:15 PM	BCl3 MFC set to  0.000000
4/23/2012	3:33:15 PM	PH3 MFC set to  0.000000
4/23/2012	3:33:15 PM	SiCl4 MFC set to  0.000000
4/23/2012	3:33:15 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	3:33:15 PM	Tube furnace set to 0
4/23/2012	3:33:16 PM	Run finished at 3:33 PM
4/23/2012	3:33:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	3:33:31 PM	Helium MFC set to  20.000000
4/23/2012	3:33:33 PM	Helium valve opened
4/23/2012	3:33:37 PM	Helium valve closed
4/23/2012	3:54:11 PM	Helium valve opened
4/23/2012	3:54:21 PM	Helium valve closed
4/23/2012	4:41:46 PM	Recipe started at 4:41 PM
4/23/2012	4:41:46 PM	Helium valve closed
4/23/2012	4:41:46 PM	H2 valve closed
4/23/2012	4:41:46 PM	BCl3 valve closed
4/23/2012	4:41:46 PM	PH3 valve closed
4/23/2012	4:41:46 PM	SiCl4 pre valve closed
4/23/2012	4:41:46 PM	SiCl4 post valve closed
4/23/2012	4:41:46 PM	Bypass valve closed
4/23/2012	4:41:46 PM	Bubbler valve closed
4/23/2012	4:41:46 PM	Main Vac valve opened
4/23/2012	4:41:46 PM	Helium MFC set to  0.000000
4/23/2012	4:41:46 PM	H2 MFC set to  0.000000
4/23/2012	4:41:46 PM	BCl3 MFC set to  0.000000
4/23/2012	4:41:46 PM	PH3 MFC set to  0.000000
4/23/2012	4:41:46 PM	SiCl4 MFC set to  0.000000
4/23/2012	4:41:46 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	4:41:46 PM	Tube furnace set to 0
4/23/2012	4:41:54 PM	Helium valve closed
4/23/2012	4:41:54 PM	H2 valve closed
4/23/2012	4:41:54 PM	BCl3 valve closed
4/23/2012	4:41:54 PM	PH3 valve closed
4/23/2012	4:41:54 PM	SiCl4 pre valve closed
4/23/2012	4:41:54 PM	SiCl4 post valve closed
4/23/2012	4:41:54 PM	Main Vac valve closed
4/23/2012	4:41:54 PM	Bypass valve closed
4/23/2012	4:41:54 PM	Bubbler valve closed
4/23/2012	4:41:54 PM	Helium MFC set to  0.000000
4/23/2012	4:41:54 PM	H2 MFC set to  0.000000
4/23/2012	4:41:54 PM	BCl3 MFC set to  0.000000
4/23/2012	4:41:54 PM	PH3 MFC set to  0.000000
4/23/2012	4:41:54 PM	SiCl4 MFC set to  0.000000
4/23/2012	4:41:54 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	4:41:54 PM	Tube furnace set to 0
4/23/2012	4:41:58 PM	Helium valve closed
4/23/2012	4:41:58 PM	BCl3 valve closed
4/23/2012	4:41:58 PM	PH3 valve closed
4/23/2012	4:41:58 PM	SiCl4 pre valve closed
4/23/2012	4:41:58 PM	SiCl4 post valve closed
4/23/2012	4:41:58 PM	Main Vac valve closed
4/23/2012	4:41:58 PM	Bypass valve closed
4/23/2012	4:41:58 PM	Bubbler valve closed
4/23/2012	4:41:58 PM	H2 valve opened
4/23/2012	4:41:58 PM	Helium MFC set to  0.000000
4/23/2012	4:41:58 PM	H2 MFC set to  500.000000
4/23/2012	4:41:58 PM	BCl3 MFC set to  0.000000
4/23/2012	4:41:58 PM	PH3 MFC set to  0.000000
4/23/2012	4:41:58 PM	SiCl4 MFC set to  0.000000
4/23/2012	4:41:58 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	4:41:58 PM	Tube furnace set to 0
4/23/2012	4:43:05 PM	Helium valve closed
4/23/2012	4:43:05 PM	BCl3 valve closed
4/23/2012	4:43:05 PM	PH3 valve closed
4/23/2012	4:43:05 PM	SiCl4 pre valve closed
4/23/2012	4:43:05 PM	SiCl4 post valve closed
4/23/2012	4:43:05 PM	Main Vac valve closed
4/23/2012	4:43:05 PM	Bypass valve closed
4/23/2012	4:43:05 PM	H2 valve opened
4/23/2012	4:43:05 PM	Bubbler valve opened
4/23/2012	4:43:05 PM	Helium MFC set to  0.000000
4/23/2012	4:43:05 PM	H2 MFC set to  500.000000
4/23/2012	4:43:05 PM	BCl3 MFC set to  0.000000
4/23/2012	4:43:05 PM	PH3 MFC set to  0.000000
4/23/2012	4:43:05 PM	SiCl4 MFC set to  0.000000
4/23/2012	4:43:05 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	4:43:05 PM	Tube furnace set to 0
4/23/2012	4:43:06 PM	Helium valve closed
4/23/2012	4:43:06 PM	BCl3 valve closed
4/23/2012	4:43:06 PM	PH3 valve closed
4/23/2012	4:43:06 PM	SiCl4 pre valve closed
4/23/2012	4:43:06 PM	SiCl4 post valve closed
4/23/2012	4:43:06 PM	Main Vac valve closed
4/23/2012	4:43:06 PM	Bypass valve closed
4/23/2012	4:43:06 PM	H2 valve opened
4/23/2012	4:43:06 PM	Bubbler valve opened
4/23/2012	4:43:06 PM	Helium MFC set to  0.000000
4/23/2012	4:43:06 PM	H2 MFC set to  500.000000
4/23/2012	4:43:06 PM	BCl3 MFC set to  0.000000
4/23/2012	4:43:06 PM	PH3 MFC set to  0.000000
4/23/2012	4:43:06 PM	SiCl4 MFC set to  0.000000
4/23/2012	4:43:06 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	4:43:06 PM	Tube furnace set to 1000
4/23/2012	5:03:07 PM	Helium valve closed
4/23/2012	5:03:07 PM	PH3 valve closed
4/23/2012	5:03:07 PM	Main Vac valve closed
4/23/2012	5:03:07 PM	Bypass valve closed
4/23/2012	5:03:07 PM	H2 valve opened
4/23/2012	5:03:07 PM	BCl3 valve opened
4/23/2012	5:03:07 PM	SiCl4 pre valve opened
4/23/2012	5:03:07 PM	SiCl4 post valve opened
4/23/2012	5:03:07 PM	Bubbler valve opened
4/23/2012	5:03:07 PM	Helium MFC set to  0.000000
4/23/2012	5:03:07 PM	H2 MFC set to  450.000000
4/23/2012	5:03:07 PM	BCl3 MFC set to  1.500000
4/23/2012	5:03:07 PM	PH3 MFC set to  0.000000
4/23/2012	5:03:07 PM	SiCl4 MFC set to  50.000000
4/23/2012	5:03:07 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:03:07 PM	Tube furnace set to 1000
4/23/2012	5:15:07 PM	Helium valve closed
4/23/2012	5:15:07 PM	BCl3 valve closed
4/23/2012	5:15:07 PM	Main Vac valve closed
4/23/2012	5:15:07 PM	Bypass valve closed
4/23/2012	5:15:07 PM	H2 valve opened
4/23/2012	5:15:07 PM	PH3 valve opened
4/23/2012	5:15:07 PM	SiCl4 pre valve opened
4/23/2012	5:15:07 PM	SiCl4 post valve opened
4/23/2012	5:15:07 PM	Bubbler valve opened
4/23/2012	5:15:07 PM	Helium MFC set to  0.000000
4/23/2012	5:15:07 PM	H2 MFC set to  450.000000
4/23/2012	5:15:07 PM	BCl3 MFC set to  0.000000
4/23/2012	5:15:07 PM	PH3 MFC set to  20.000000
4/23/2012	5:15:07 PM	SiCl4 MFC set to  50.000000
4/23/2012	5:15:07 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:15:07 PM	Tube furnace set to 1000
4/23/2012	5:20:07 PM	Helium valve closed
4/23/2012	5:20:07 PM	BCl3 valve closed
4/23/2012	5:20:07 PM	PH3 valve closed
4/23/2012	5:20:07 PM	SiCl4 pre valve closed
4/23/2012	5:20:07 PM	SiCl4 post valve closed
4/23/2012	5:20:07 PM	Main Vac valve closed
4/23/2012	5:20:07 PM	Bypass valve closed
4/23/2012	5:20:07 PM	H2 valve opened
4/23/2012	5:20:07 PM	Bubbler valve opened
4/23/2012	5:20:07 PM	Helium MFC set to  0.000000
4/23/2012	5:20:07 PM	H2 MFC set to  500.000000
4/23/2012	5:20:07 PM	BCl3 MFC set to  0.000000
4/23/2012	5:20:07 PM	PH3 MFC set to  0.000000
4/23/2012	5:20:07 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:20:07 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:20:07 PM	Tube furnace set to 950
4/23/2012	5:22:07 PM	Helium valve closed
4/23/2012	5:22:07 PM	BCl3 valve closed
4/23/2012	5:22:07 PM	PH3 valve closed
4/23/2012	5:22:07 PM	SiCl4 pre valve closed
4/23/2012	5:22:07 PM	SiCl4 post valve closed
4/23/2012	5:22:07 PM	Main Vac valve closed
4/23/2012	5:22:07 PM	Bypass valve closed
4/23/2012	5:22:07 PM	H2 valve opened
4/23/2012	5:22:07 PM	Bubbler valve opened
4/23/2012	5:22:07 PM	Helium MFC set to  0.000000
4/23/2012	5:22:07 PM	H2 MFC set to  500.000000
4/23/2012	5:22:07 PM	BCl3 MFC set to  0.000000
4/23/2012	5:22:07 PM	PH3 MFC set to  0.000000
4/23/2012	5:22:07 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:22:07 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:22:07 PM	Tube furnace set to 900
4/23/2012	5:24:07 PM	Helium valve closed
4/23/2012	5:24:07 PM	BCl3 valve closed
4/23/2012	5:24:07 PM	PH3 valve closed
4/23/2012	5:24:07 PM	SiCl4 pre valve closed
4/23/2012	5:24:07 PM	SiCl4 post valve closed
4/23/2012	5:24:07 PM	Main Vac valve closed
4/23/2012	5:24:07 PM	Bypass valve closed
4/23/2012	5:24:07 PM	H2 valve opened
4/23/2012	5:24:07 PM	Bubbler valve opened
4/23/2012	5:24:07 PM	Helium MFC set to  0.000000
4/23/2012	5:24:07 PM	H2 MFC set to  500.000000
4/23/2012	5:24:07 PM	BCl3 MFC set to  0.000000
4/23/2012	5:24:07 PM	PH3 MFC set to  0.000000
4/23/2012	5:24:07 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:24:07 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:24:08 PM	Tube furnace set to 850
4/23/2012	5:26:08 PM	H2 valve closed
4/23/2012	5:26:08 PM	BCl3 valve closed
4/23/2012	5:26:08 PM	PH3 valve closed
4/23/2012	5:26:08 PM	SiCl4 pre valve closed
4/23/2012	5:26:08 PM	SiCl4 post valve closed
4/23/2012	5:26:08 PM	Main Vac valve closed
4/23/2012	5:26:08 PM	Bypass valve closed
4/23/2012	5:26:08 PM	Helium valve opened
4/23/2012	5:26:08 PM	Bubbler valve opened
4/23/2012	5:26:08 PM	Helium MFC set to  500.000000
4/23/2012	5:26:08 PM	H2 MFC set to  0.000000
4/23/2012	5:26:08 PM	BCl3 MFC set to  0.000000
4/23/2012	5:26:08 PM	PH3 MFC set to  0.000000
4/23/2012	5:26:08 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:26:08 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:26:08 PM	Tube furnace set to 800
4/23/2012	5:28:08 PM	H2 valve closed
4/23/2012	5:28:08 PM	BCl3 valve closed
4/23/2012	5:28:08 PM	PH3 valve closed
4/23/2012	5:28:08 PM	SiCl4 pre valve closed
4/23/2012	5:28:08 PM	SiCl4 post valve closed
4/23/2012	5:28:08 PM	Main Vac valve closed
4/23/2012	5:28:08 PM	Bypass valve closed
4/23/2012	5:28:08 PM	Helium valve opened
4/23/2012	5:28:08 PM	Bubbler valve opened
4/23/2012	5:28:08 PM	Helium MFC set to  500.000000
4/23/2012	5:28:08 PM	H2 MFC set to  0.000000
4/23/2012	5:28:08 PM	BCl3 MFC set to  0.000000
4/23/2012	5:28:08 PM	PH3 MFC set to  0.000000
4/23/2012	5:28:08 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:28:08 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:28:08 PM	Tube furnace set to 750
4/23/2012	5:30:08 PM	H2 valve closed
4/23/2012	5:30:08 PM	BCl3 valve closed
4/23/2012	5:30:08 PM	PH3 valve closed
4/23/2012	5:30:08 PM	SiCl4 pre valve closed
4/23/2012	5:30:08 PM	SiCl4 post valve closed
4/23/2012	5:30:08 PM	Main Vac valve closed
4/23/2012	5:30:08 PM	Bypass valve closed
4/23/2012	5:30:08 PM	Helium valve opened
4/23/2012	5:30:08 PM	Bubbler valve opened
4/23/2012	5:30:08 PM	Helium MFC set to  500.000000
4/23/2012	5:30:08 PM	H2 MFC set to  0.000000
4/23/2012	5:30:08 PM	BCl3 MFC set to  0.000000
4/23/2012	5:30:08 PM	PH3 MFC set to  0.000000
4/23/2012	5:30:08 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:30:08 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:30:08 PM	Tube furnace set to 0
4/23/2012	5:50:08 PM	Helium valve closed
4/23/2012	5:50:08 PM	H2 valve closed
4/23/2012	5:50:08 PM	BCl3 valve closed
4/23/2012	5:50:08 PM	PH3 valve closed
4/23/2012	5:50:08 PM	SiCl4 pre valve closed
4/23/2012	5:50:08 PM	SiCl4 post valve closed
4/23/2012	5:50:08 PM	Main Vac valve closed
4/23/2012	5:50:08 PM	Bypass valve closed
4/23/2012	5:50:08 PM	Bubbler valve closed
4/23/2012	5:50:08 PM	Helium MFC set to  0.000000
4/23/2012	5:50:08 PM	H2 MFC set to  0.000000
4/23/2012	5:50:08 PM	BCl3 MFC set to  0.000000
4/23/2012	5:50:08 PM	PH3 MFC set to  0.000000
4/23/2012	5:50:08 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:50:08 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:50:09 PM	Tube furnace set to 0
4/23/2012	5:50:10 PM	Helium valve closed
4/23/2012	5:50:10 PM	H2 valve closed
4/23/2012	5:50:10 PM	BCl3 valve closed
4/23/2012	5:50:10 PM	PH3 valve closed
4/23/2012	5:50:10 PM	SiCl4 pre valve closed
4/23/2012	5:50:10 PM	SiCl4 post valve closed
4/23/2012	5:50:10 PM	Main Vac valve closed
4/23/2012	5:50:10 PM	Bubbler valve closed
4/23/2012	5:50:10 PM	Bypass valve opened
4/23/2012	5:50:10 PM	Helium MFC set to  0.000000
4/23/2012	5:50:10 PM	H2 MFC set to  0.000000
4/23/2012	5:50:10 PM	BCl3 MFC set to  0.000000
4/23/2012	5:50:10 PM	PH3 MFC set to  0.000000
4/23/2012	5:50:10 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:50:10 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:50:10 PM	Tube furnace set to 0
4/23/2012	5:50:56 PM	Helium valve closed
4/23/2012	5:50:56 PM	H2 valve closed
4/23/2012	5:50:56 PM	BCl3 valve closed
4/23/2012	5:50:56 PM	PH3 valve closed
4/23/2012	5:50:56 PM	SiCl4 pre valve closed
4/23/2012	5:50:56 PM	SiCl4 post valve closed
4/23/2012	5:50:56 PM	Main Vac valve closed
4/23/2012	5:50:56 PM	Bubbler valve closed
4/23/2012	5:50:56 PM	Bypass valve opened
4/23/2012	5:50:56 PM	Helium MFC set to  0.000000
4/23/2012	5:50:56 PM	H2 MFC set to  0.000000
4/23/2012	5:50:56 PM	BCl3 MFC set to  0.000000
4/23/2012	5:50:56 PM	PH3 MFC set to  0.000000
4/23/2012	5:50:56 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:50:56 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:50:56 PM	Tube furnace set to 0
4/23/2012	5:51:56 PM	Helium valve closed
4/23/2012	5:51:56 PM	H2 valve closed
4/23/2012	5:51:56 PM	BCl3 valve closed
4/23/2012	5:51:56 PM	PH3 valve closed
4/23/2012	5:51:56 PM	SiCl4 pre valve closed
4/23/2012	5:51:56 PM	SiCl4 post valve closed
4/23/2012	5:51:56 PM	Bypass valve closed
4/23/2012	5:51:56 PM	Bubbler valve closed
4/23/2012	5:51:56 PM	Main Vac valve opened
4/23/2012	5:51:56 PM	Helium MFC set to  0.000000
4/23/2012	5:51:56 PM	H2 MFC set to  0.000000
4/23/2012	5:51:56 PM	BCl3 MFC set to  0.000000
4/23/2012	5:51:56 PM	PH3 MFC set to  0.000000
4/23/2012	5:51:56 PM	SiCl4 MFC set to  0.000000
4/23/2012	5:51:56 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	5:51:56 PM	Tube furnace set to 0
4/23/2012	5:51:57 PM	Run finished at 5:51 PM
4/23/2012	9:12:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	9:12:47 PM	Recipe started at 9:12 PM
4/23/2012	9:12:47 PM	Helium valve closed
4/23/2012	9:12:47 PM	H2 valve closed
4/23/2012	9:12:47 PM	BCl3 valve closed
4/23/2012	9:12:47 PM	PH3 valve closed
4/23/2012	9:12:47 PM	SiCl4 pre valve closed
4/23/2012	9:12:47 PM	SiCl4 post valve closed
4/23/2012	9:12:47 PM	Main Vac valve closed
4/23/2012	9:12:47 PM	Bypass valve closed
4/23/2012	9:12:47 PM	Bubbler valve closed
4/23/2012	9:12:47 PM	Helium MFC set to  0.000000
4/23/2012	9:12:47 PM	H2 MFC set to  0.000000
4/23/2012	9:12:47 PM	BCl3 MFC set to  0.000000
4/23/2012	9:12:47 PM	PH3 MFC set to  0.000000
4/23/2012	9:12:47 PM	SiCl4 MFC set to  0.000000
4/23/2012	9:12:47 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	9:12:47 PM	Tube furnace set to 0
4/23/2012	9:12:50 PM	H2 valve closed
4/23/2012	9:12:50 PM	BCl3 valve closed
4/23/2012	9:12:50 PM	PH3 valve closed
4/23/2012	9:12:50 PM	SiCl4 pre valve closed
4/23/2012	9:12:50 PM	SiCl4 post valve closed
4/23/2012	9:12:50 PM	Main Vac valve closed
4/23/2012	9:12:50 PM	Bypass valve closed
4/23/2012	9:12:50 PM	Bubbler valve closed
4/23/2012	9:12:50 PM	Helium valve opened
4/23/2012	9:12:50 PM	Helium MFC set to  500.000000
4/23/2012	9:12:50 PM	H2 MFC set to  0.000000
4/23/2012	9:12:50 PM	BCl3 MFC set to  0.000000
4/23/2012	9:12:50 PM	PH3 MFC set to  0.000000
4/23/2012	9:12:50 PM	SiCl4 MFC set to  0.000000
4/23/2012	9:12:50 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	9:12:51 PM	Tube furnace set to 0
4/23/2012	9:13:55 PM	Helium valve closed
4/23/2012	9:13:55 PM	H2 valve closed
4/23/2012	9:13:55 PM	BCl3 valve closed
4/23/2012	9:13:55 PM	PH3 valve closed
4/23/2012	9:13:55 PM	SiCl4 pre valve closed
4/23/2012	9:13:55 PM	SiCl4 post valve closed
4/23/2012	9:13:55 PM	Main Vac valve closed
4/23/2012	9:13:55 PM	Bypass valve closed
4/23/2012	9:13:55 PM	Bubbler valve closed
4/23/2012	9:13:55 PM	Helium MFC set to  0.000000
4/23/2012	9:13:55 PM	H2 MFC set to  0.000000
4/23/2012	9:13:55 PM	BCl3 MFC set to  0.000000
4/23/2012	9:13:55 PM	PH3 MFC set to  0.000000
4/23/2012	9:13:55 PM	SiCl4 MFC set to  0.000000
4/23/2012	9:13:55 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	9:13:56 PM	Tube furnace set to 0
4/23/2012	9:13:57 PM	Run finished at 9:13 PM
4/23/2012	9:13:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/23/2012	9:53:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/23/2012	9:53:21 PM	Recipe started at 9:53 PM
4/23/2012	9:53:21 PM	Helium valve closed
4/23/2012	9:53:21 PM	H2 valve closed
4/23/2012	9:53:21 PM	BCl3 valve closed
4/23/2012	9:53:21 PM	PH3 valve closed
4/23/2012	9:53:21 PM	SiCl4 pre valve closed
4/23/2012	9:53:21 PM	SiCl4 post valve closed
4/23/2012	9:53:21 PM	Main Vac valve closed
4/23/2012	9:53:21 PM	Bubbler valve closed
4/23/2012	9:53:21 PM	Bypass valve opened
4/23/2012	9:53:21 PM	Helium MFC set to  0.000000
4/23/2012	9:53:21 PM	H2 MFC set to  0.000000
4/23/2012	9:53:21 PM	BCl3 MFC set to  0.000000
4/23/2012	9:53:21 PM	PH3 MFC set to  0.000000
4/23/2012	9:53:21 PM	SiCl4 MFC set to  0.000000
4/23/2012	9:53:21 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	9:53:21 PM	Tube furnace set to 0
4/23/2012	9:54:21 PM	Helium valve closed
4/23/2012	9:54:21 PM	H2 valve closed
4/23/2012	9:54:21 PM	BCl3 valve closed
4/23/2012	9:54:21 PM	PH3 valve closed
4/23/2012	9:54:21 PM	SiCl4 pre valve closed
4/23/2012	9:54:21 PM	SiCl4 post valve closed
4/23/2012	9:54:21 PM	Main Vac valve closed
4/23/2012	9:54:21 PM	Bubbler valve closed
4/23/2012	9:54:21 PM	Bypass valve opened
4/23/2012	9:54:21 PM	Helium MFC set to  0.000000
4/23/2012	9:54:21 PM	H2 MFC set to  0.000000
4/23/2012	9:54:21 PM	BCl3 MFC set to  0.000000
4/23/2012	9:54:21 PM	PH3 MFC set to  0.000000
4/23/2012	9:54:21 PM	SiCl4 MFC set to  0.000000
4/23/2012	9:54:21 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	9:54:21 PM	Tube furnace set to 0
4/23/2012	9:55:21 PM	Helium valve closed
4/23/2012	9:55:21 PM	H2 valve closed
4/23/2012	9:55:21 PM	BCl3 valve closed
4/23/2012	9:55:21 PM	PH3 valve closed
4/23/2012	9:55:21 PM	SiCl4 pre valve closed
4/23/2012	9:55:21 PM	SiCl4 post valve closed
4/23/2012	9:55:21 PM	Bypass valve closed
4/23/2012	9:55:21 PM	Bubbler valve closed
4/23/2012	9:55:21 PM	Main Vac valve opened
4/23/2012	9:55:21 PM	Helium MFC set to  0.000000
4/23/2012	9:55:21 PM	H2 MFC set to  0.000000
4/23/2012	9:55:21 PM	BCl3 MFC set to  0.000000
4/23/2012	9:55:21 PM	PH3 MFC set to  0.000000
4/23/2012	9:55:21 PM	SiCl4 MFC set to  0.000000
4/23/2012	9:55:21 PM	Bypass solenoid MFC set to  0.000000
4/23/2012	9:55:21 PM	Tube furnace set to 0
4/23/2012	9:55:22 PM	Run finished at 9:55 PM
4/23/2012	9:55:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
